JPH0725256Y2 - スピンナー装置 - Google Patents

スピンナー装置

Info

Publication number
JPH0725256Y2
JPH0725256Y2 JP1989107487U JP10748789U JPH0725256Y2 JP H0725256 Y2 JPH0725256 Y2 JP H0725256Y2 JP 1989107487 U JP1989107487 U JP 1989107487U JP 10748789 U JP10748789 U JP 10748789U JP H0725256 Y2 JPH0725256 Y2 JP H0725256Y2
Authority
JP
Japan
Prior art keywords
casing
partition wall
chuck
spinner device
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989107487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0347070U (en]
Inventor
宏仁 佐合
秀行 水木
晃 植原
宗雄 中山
正治 山本
和志 川上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Tazmo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Tazmo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd, Tazmo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP1989107487U priority Critical patent/JPH0725256Y2/ja
Publication of JPH0347070U publication Critical patent/JPH0347070U/ja
Application granted granted Critical
Publication of JPH0725256Y2 publication Critical patent/JPH0725256Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP1989107487U 1989-09-13 1989-09-13 スピンナー装置 Expired - Fee Related JPH0725256Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989107487U JPH0725256Y2 (ja) 1989-09-13 1989-09-13 スピンナー装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989107487U JPH0725256Y2 (ja) 1989-09-13 1989-09-13 スピンナー装置

Publications (2)

Publication Number Publication Date
JPH0347070U JPH0347070U (en]) 1991-04-30
JPH0725256Y2 true JPH0725256Y2 (ja) 1995-06-07

Family

ID=31656178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989107487U Expired - Fee Related JPH0725256Y2 (ja) 1989-09-13 1989-09-13 スピンナー装置

Country Status (1)

Country Link
JP (1) JPH0725256Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6377569A (ja) * 1986-09-19 1988-04-07 Dainippon Screen Mfg Co Ltd 基板の回転式表面処理装置
JP3007978U (ja) * 1994-08-19 1995-02-28 株式会社オーディオテクニカ マイクロホン装置

Also Published As

Publication number Publication date
JPH0347070U (en]) 1991-04-30

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees